Multipurpose Fast Ramping Process Furnace
PEO 601 - 603 - 604 - 612 - over 400 worldwide units
The multipurpose fast ramping process furnaces PEO with energy and floor space saving capability are Kanthal ® wire heated "hot wall" process ovens. The PEOs are ideal for R&D, process development of unique and sophisticated new processes as well for low to medium volume production.
LPCVD, CVD, Epitaxy, Polysilicon, Silicon Nitride, LTO, TEOS, solid/liquid/gas precursor diffusion, low k, HSQ, HMDS, wet/dry thermal oxide, Pyrogenic oxidation, VECSEL, MOCVD, Trans LC, Si nano wires, post implanting annealing, carbon nano tubes, Graphene, solar cell, batch ALD, Polyimide/BCB curing, wafer bump reflow, alloying, thick film paste firing, LTCC sintering, annealing under inert atmosphere/Hydrogen/high vacuum, Tellurium/Se/Hg PVD