BSET EQ - Solution Through Gas Plasma

Plasma Decapsulation

World Novelty

 

 

 

Plasma decapsulation with CO2 SNOW FILLERBLAST ™, up to 250 microns/hour epoxy etch. More information here >>

 

 

 

 

 

 

 

Wafer level failure analysis

  • FA-2000 Series - Reactive Ion Etchers, Functional Delayering, Isotropic Polyimide removal, Anisotropic Si3N4 removal
  • NT Series - Planar Plasma Systems for Etching & Cleaning
  • SP Series - Classic Barrel Reactors

 

More information here